MEMS Variable Optical Attenuator Integrated With Input Tap

  • VOA + Tap
  • Compact Size
  • Low Cost
  • High Reliability
  • Low IL, PDL, WDL and TDL
  • Direct Drive

Click 'Spec Sheet' for available configurations/part#


The MEMS Series VOA is based on a micro-electro-mechanical mechanism featuring integrated compact design, simple construction, easy direct drive, and excellent optical performance of ultra low insertion loss, low PDL, and broad wavelength operation range. The MEMS Series VOA is compliant with the Telcordia 1209 and 1221 reliability standards. The MEMS Series  VOA is available in either normally-open or normally-closed configurations and with an integrated input tap option.

The VOA is driven by applying an electrical voltage.


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etMEMSTM Series TVOA Min Typical Max Unit
 Operation Wavelength                                                1260 -1360 or 1510-1620 nm
 Insertion Loss [1] 0.5 0.8 dB
 Polarization Dependent Loss [2] (SM version only) 0.15 0.5 dB
 Wavelength Dependence Loss [3], [4] 0.2 0.6 dB
 Attenuation Range 25 30 dB
 Attenuation Resolution Continuous
 Extinction Ratio (PM version only) 18 23 25 dB
 Polarization Mode Dispersion (SM version only) 0.01 0.05 ps
 Return Loss 45 dB
 Response Time 3 6 ms
 Driving Voltage [5] 4.5 5.2[7] V
 Device Resistance 80 100 120 W
 Optical Power handling 300 500 mW
 Tap Response @ 1550nm [8] 12 15 40 mA/W
Tap directivity N/A or 25 dB
 Tap Wavelength Dependence Response[6] 0.010 0.013 0.02 dB/nm
 Tap Polarization Dependence Response 0.02 0.10 0.25 dB
 Tap Temperature Dependence Response 0.01 dB/°C
 Tap Dark Current at 5V bias @ 23°C 0.2 1 nA
 Tap Dark Current at 5V bias @ 70°C 30 70 nA
 Tap 3dB Bandwidth (cutoff frequency) 10 MHz
 Tap Capacitance 12 pF
 Operating Temperature -5 75 oC
 Storage Temperature -40 85 oC
 Reliability Telcordia 1209 and 1221
 Package Dimension F6.1 X 35.2 mm



[1].Without connector and at room temperature

[2].At attenuation equal or less than 20 dB

[3].At 0dB attenuation and at whole temperature range

[4].Within 40nm Bandwidth

[5].At 20dB attenuation for transparent version, at 0.8dB attenuation for opaque version.

[6].This is related to tap ratio. The spec data is regarding 3% tap.

[7].Over this value will damage the device.

[8] Tap response depends on tap ratio.