etMEMS™ Mini Variable Optical Attenuator with Input Power Monitor


The mini MEMS Variable Optical Attenuator Integrated with Input Optical Power Monitor is a hybrid fiber optical device that integrates a thin-film tap of flat spectral response and a high sensitivity PIN photodiode for power monitoring applications with a MEMS VOA. The Power Monitor minimizes component assembly costs and module footprint. The thermal MEMS VOA has little temperature dependence and drift. It is intrinsically more reliable than electrostatic MEMS VOAs.

The Power Monitor has low insertion loss and low dark current with high temperature stability over a wide wavelength range from 1260nm to 1620nm band.

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  • Integrated
  • Low Loss Device
  • Custom Tap Ratios Available
  • Compact Design
  • Channel Monitoring
  • Power Monitoring in Optical Interface Modules
  • Gain Monitoring for Amplifier
  • DWDM System Monitoring
etMEMSTM  TVOA Min Typical Max Unit
 Wavelength                                    1260                           1620 nm
 Insertion Loss[1] 0.6 0.8 dB
 Polarization Dependent Loss[2] 0.15 0.4 dB
 Wavelength Dependence Loss[3],[4] 0.3 dB
 Temperature Dependence Loss[3] 0.05 0.2 dB
 Attenuation Range 25 35 dB
 Attenuation Resolution Continuous
 Polarization Mode Dispersion[2] 0.005 0.01 0.05 ps
 Return Loss 45 dB
 Response Time 5 ms
TAP ratio 1 3 5 %
 Tap Response @ 1550nm 8 20 40 mA/W
 Wavelength Dependence Response 0.02 0.03 dB/nm
 Polarization Dependence Response[2] 0.02 0.10 0.25 dB
 Temperature Dependence Response 0.01 dB/°C
 Dark Current at 5V bias @ 23°C 1 nA
 3dB Bandwidth (cutoff frequency) 10 MHz
 Capacitance 6 pF
 Power Consumption 130 180 mW
 Operating Temperature -5 75 oC
 Storage Temperature -40 85 oC
Reliability Telcordia 1209 and 1221
Fiber Type                Corning SMF28
Package Dimension F3.5 X 15 or F3.5 X 23[5] mm



  1. Without connector and in room temperature. If the tap ratio higher than 3%, the insertion loss will increase.
  2. At attenuation equal or less than 20dB
  3. At 0dB attenuation and in whole temperature range
  4. Within 30nm Bandwidth
  5. For the power monitor with the directivity which is defined as the responsivity contrast between the light from input or output.