In-House MEMS Chip Fabrication

Agiltron leads the industry in advanced thermal actuated MEMS device design and fabrication. The company operates a 150mm wafer fabrication facility. The 5,000 ft² cleanroom space also serves as a new product development, demonstration, integration and qualification area for outside customers.

Agiltron produces MEMS chips at our inhouse MEMS fab facility, located at Woburn headquarter. This capability allows us to reduce the fabrication cost through tight control  of manufacturing yield and quality, as well as to continuously improve the performance of our MEMS-based products, through the combination of design and process improvements. Moreover, we have developed vision based automatic wafer testing tools that ensure the dynamic performance and quality of each individual MEMS chip

Automatic Optical Alignment Package

Agiltron is perfecting semi-automated precision assembly technologies for fiber optical devices. This unique production capability (acquired over the course of 20 years of continuous operation) provides our customers with unmatched cost, scale, and performance advantages.

Large Motion MEMS Technology

Conventional MEMS are based on electrostatic actuation that is prone to electrical charge build-up induced drift and moisture induced electrical shorting requiring expensive hermetic sealing. Agiltron’s MEMS is based on electro-thermal driven actuation principle. Our unique etMEMSTM design provides advantages for fiber optic components including:

1. Large actuation force over mm

2. Low direct driving voltage <5V

3. A few fabrication steps, high yield

4. No need for hermetic package

5. Intrinsic tolerance to EDS

Our MEMS switches and VOAs are based on single crystalline silicon, an exceptional material that does not deform, fatigue, or wear out over time, and its dimensions and mechanical properties are immune to stress unless a critical fracture stress-level or a permanent deformation high temperature is reached. Data results from testing show that Agiltron MEMS switches and VOAs still work within specifications after many billion cycles.