MEMS 0.26mm Movement Free Space Attenuator/Shutter Chip

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The etMEMS™ series of free space variable optic attenuator (FS-VOA) is based on a proprietary patent pending micro-electro-mechanical mechanism featuring exceptionally compact size with large shutter movement, simple construction, and direct drive. The etMEMS™ series of FS-VOA is designed to completely block a collimated light beam <= 260 mm in diameter and be operated in air without the need for hermetic seal and is fully compliant with the Telcordia 1209 and 1221 reliability standards. The device is ideally suited to be integrated into laser and coherent detection systems.

The different movement FS-VOA chip up to 700um is available, please contact us.

  • Compact
  • High Reliability
  • Low IL, PDL, WDL & TDL
  • Intrinsic tolerance to ESD
  • Power Control
  • Power Regulate
  • Channel Balance
  • Instrumentation


FS Series VOA/ShutterMinTypicalMaxUnit
Attenuation ResolutionContinuous
Shutter Movement260mm
Response Time2060ms
Optical Power Handling400mW
Driving Voltage[1]3.54V
Device Resistance60 [2]95Ohm
Power Consumption190210mW
Resonant Frequency1000Hz
Operating Temperature-575oC
Storage Temperature-4085oC
Reliability          Telcordia 1209 and 1221
Package DimensionSee drawingmm
[1].   For full dynamic range.
[2].   At voltage 3.5V.
P/N: N/A