MEMS 0.26mm Movement Free Space Attenuator/Shutter Chip

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The etMEMS™ series of free space variable optic attenuator (FS-VOA) is based on a proprietary patent pending micro-electro-mechanical mechanism featuring exceptionally compact size with large shutter movement, simple construction, and direct drive. The etMEMS™ series of FS-VOA is designed to completely block a collimated light beam <= 260 mm in diameter and be operated in air without the need for hermetic seal and is fully compliant with the Telcordia 1209 and 1221 reliability standards. The device is ideally suited to be integrated into laser and coherent detection systems.

The different movement FS-VOA chip up to 700um is available, please contact us.

  • Compact
  • High Reliability
  • Low IL, PDL, WDL & TDL
  • Intrinsic tolerance to ESD
  • Power Control
  • Power Regulate
  • Channel Balance
  • Instrumentation


FS Series VOA/Shutter Min Typical Max Unit
Attenuation Resolution Continuous
Shutter Movement 260 mm
Response Time 20 60 ms
Optical Power Handling 400 mW
Driving Voltage[1] 3.5 4 V
Device Resistance 60 [2] 95 Ohm
Power Consumption 190 210 mW
Resonant Frequency 1000 Hz
Operating Temperature -5 75 oC
Storage Temperature -40 85 oC
Reliability           Telcordia 1209 and 1221
Package Dimension See drawing mm
[1].   For full dynamic range.
[2].   At voltage 3.5V.
P/N: N/A