MEMS 0.26mm Movement Free Space Attenuator/Shutter Chip

  • Compact
  • High Reliability
  • Low IL, PDL, WDL & TDL
  • Intrinsic tolerance to ESD

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The etMEMS™ series of free space variable optic attenuator (FS-VOA) is based on our proprietary patent-pending micro-electro-mechanical mechanism, featuring exceptionally compact size, large shutter movement, simple construction, and direct drive. The etMEMS™ series of FS-VOA are designed to completely block a collimated light beam <= 260 mm in diameter and to be operated in air without the need for a hermetic seal. They are fully compliant with the Telcordia 1209 and 1221 reliability standards. The device is ideally suited to be integrated into laser and coherent detection systems.

The different movement FS-VOA chip up to 700um is available, please contact us.


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