Scanning MEMS Mirror – 0.6, 1.5, 2.0 mm Diameter

  • Single and Dual-Axis
  • Up To 7 Degree
  • High Precision
  • Compact
  • High Reliability
  • Low Power Consumption
  • High Repeatability

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The SMEM series of scanning two-axis (tip-tilt) MEMS mirrors provide 2D optical beam-steering functions. The SMEMS features faster scanning, very low power consumption, high precision, and high repeatability. The MEMS is made of single-crystal silicon with a flat and smooth mirror coated with a highly refractive gold thin film. The SMEM is hermetically packaged with an optical window designed for 25 years of continuous operation. Driving PCB is also offered for convenient evaluations. For volume application contact sales


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