MEMS 0.5mm Movement Free Space Attenuator/Shutter Chip

  • Compact
  • High Reliability
  • Low IL, PDL, WDL & TDL
  • Intrinsic tolerance to ESD


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The etMEMS™series of free space variable optic attenuator (FS-VOA) is based on our proprietary, patent-pending micro-electro-mechanical mechanism, featuring exceptionally compact size with large shutter movement, simple construction, and easy direct drive. The etMEMS™ series of FS-VOA is designed to completely block a collimated light beam <= 500 mm in diameter and be operated in air without the need for a hermetic seal, and fully complies with the Telcordia 1209 and 1221 reliability standards. The device is ideally suited to be integrated into laser systems.

The different movement FS-VOA chip up to 700um is available, please contact us.


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