MEMS 0.5mm Movement Free Space Attenuator/Shutter Chip

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The etMEMS™series of free space variable optic attenuator (FS-VOA) is based on a proprietary patent pending micro-electro-mechanical mechanism featuring exceptionally compact size with large shutter movement, simple construction, and easy direct drive. The etMEMS™ series of FS-VOA is designed to completely block a collimated light beam <= 500 mm in diameter and be operated in air without the need for hermetic seal and is fully compliant with the Telcordia 1209 and 1221 reliability standards. The device is ideally suited to be integrated into laser systems.

The different movement FS-VOA chip up to 700um is available, please contact us.

  • Compact
  • High Reliability
  • Low IL, PDL, WDL & TDL
  • Intrinsic tolerance to ESD
  • Power Control
  • Power Regulate
  • Channel Balance
  • Instrumentation


FS Series VOA/Shutter Min Typical Max Unit
Attenuation Resolution Continuous
Shutter Movement 500 mm
Response Time 20 40 ms
Optical Power Handling 500 mW
Driving Voltage[1] 4.5 5 V
Device Resistance 70 [2] 100 Ohm
Power Consumption 210 250 mW
Resonant Frequency 200 Hz
Operating Temperature -5 75 oC
Storage Temperature -40 85 oC
Reliability           Telcordia 1209 and 1221
Package Dimension See drawing below mm
[1].   For full dynamic range.
[2].    At voltage 4V.
P/N: N/A