MEMS 0.5mm Movement Free Space Attenuator/Shutter With Mount

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The etMEMSTM series FS VOA is based on a proprietary patent pending micro-electro-mechanical mechanism featuring exceptionally compact size with large shutter movement, simple construction, and easy direct drive. The etMEMSTM series FS VOA is designed to completely block a collimated light beam over 500 mm in diameter and be operated in air without the need for hermetic seal and is fully compliant with the Telcordia 1209 and 1221 reliability standards. The device is ideally suited to be integrated into laser systems.

It is available in either normally-open or normally-closed configurations.

  • Compact
  • High Reliability
  • Low IL, PDL, WDL & TDL
  • Intrinsic tolerance to ESD
  • Power Control
  • Power Regulate
  • Channel Balance
  • Instrumentation


FS Series VOA/ShutterMinTypicalMaxUnit
Attenuation ResolutionContinuous
Aperture Size500mm
Response Time2060ms
Optical Power Handling500mW
Driving Voltage [1]3.54.5V
Device Resistance70 [2]100ohm
Power Consumption195mW
Operating Temperature-575oC
Storage Temperature-4085oC
Reliability          Telcordia 1209 and 1221
Package DimensionSee drawing belowmm
[1].   For full dynamic range.
[2].   At voltage 3.5V.
P/N: N/A