MEMS 0.5mm Movement Free Space Attenuator/Shutter With Mount

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The etMEMSTM series FS VOA is based on a proprietary patent pending micro-electro-mechanical mechanism featuring exceptionally compact size with large shutter movement, simple construction, and easy direct drive. The etMEMSTM series FS VOA is designed to completely block a collimated light beam over 500 mm in diameter and be operated in air without the need for hermetic seal and is fully compliant with the Telcordia 1209 and 1221 reliability standards. The device is ideally suited to be integrated into laser systems.

It is available in either normally-open or normally-closed configurations.

  • Compact
  • High Reliability
  • Low IL, PDL, WDL & TDL
  • Intrinsic tolerance to ESD
  • Power Control
  • Power Regulate
  • Channel Balance
  • Instrumentation


FS Series VOA/Shutter Min Typical Max Unit
Attenuation Resolution Continuous
Aperture Size 500 mm
Response Time 20 60 ms
Optical Power Handling 500 mW
Driving Voltage [1] 3.5 4.5 V
Device Resistance 70 [2] 100 ohm
Power Consumption 195 mW
Operating Temperature -5 75 oC
Storage Temperature -40 85 oC
Reliability           Telcordia 1209 and 1221
Package Dimension See drawing below mm
[1].   For full dynamic range.
[2].   At voltage 3.5V.
P/N: N/A